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Boron trifluoride
hgm
PDF 165918
Boron trifluoride (CF3) is a suffocating, colorless gas that is prone to wet hydrolysis in the air.
Product characteristics
Boron trifluoride gas is highly irritating. Heating or contact with wet air will decompose to form toxic and corrosive hydrogen fluoride gas, which can corrode eyes, respiratory tract and skin.
Application instructions
Boron trifluoride is commonly used in doping, ion implantation and other processes in the production of semiconductor integrated circuits.
Application instructions
Energy and Chemicals
Electronics